a loadlock chamber comprising a first accommodation space, a second accommodation space above the first accommodation space, and a third accommodation space above the second accommodation space, the first accommodation space comprising a first opening, and the second accommodation space comprising a second opening, and the third accommodation space comprising a third opening;

a first slit valve comprising a first valve plate configured to open and close the first opening, and a first actuator configured to move the first valve plate between a first open position where the first opening is open and a first closed position where the first opening is closed, wherein the first valve plate is configured to move to the first open position in a first vertical direction;

a second slit valve comprising a second valve plate configured to open and close the second opening, and a second actuator configured to move the second valve plate between a second open position where the second opening is open and a second closed position where the second opening is closed, wherein the second valve plate is configured to move to the second open position in a second vertical direction opposite to the first vertical direction;

a third slit valve comprising a third valve plate configured to open and close the third opening; and

a third actuator configured to move the third valve plate between a third open position where the third opening is open and a third closed position where the third opening is closed, wherein the third valve plate is configured to move to the third open position in the first vertical direction,

wherein the first valve plate and the second valve plate vertically overlap, and wherein each of the first valve plate and the second valve plate has a vertical height and a horizontal width, wherein the vertical height is less than the horizontal width.