US 12,264,722 B2
Vibration damping apparatus, reaction force processing system, stage apparatus, exposure apparatus, substrate processing device, and method for manufacturing article
Masamichi Ueno, Tochigi (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on May 16, 2022, as Appl. No. 17/744,838.
Claims priority of application No. 2021-085831 (JP), filed on May 21, 2021.
Prior Publication US 2022/0373055 A1, Nov. 24, 2022
Int. Cl. F16F 7/10 (2006.01); F16F 7/108 (2006.01); F16F 15/02 (2006.01)
CPC F16F 7/1017 (2013.01) [F16F 7/1011 (2013.01); F16F 7/108 (2013.01); F16F 15/022 (2013.01); F16F 2222/08 (2013.01); F16F 2228/066 (2013.01); F16F 2230/18 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A vibration damping apparatus configured to damping a vibration of a target member, the vibration damping apparatus comprising:
a mass body;
a base disposed on the target member;
a support member disposed on the base and configured to support the mass body;
a housing disposed on the base so as to surround the support member;
an elastic member disposed so as to form a space in the housing and configured to apply a force to the support member; and
a control unit configured to control a pressure of a fluid in the space by supplying the fluid to the space based on a vibration state of the target member.
 
15. A reaction force processing system comprising:
a vibration damping apparatus;
a coil; and
a magnet,
wherein the vibration damping apparatus includes:
a mass body;
a base disposed on a target member;
a support member disposed on the base and configured to support the mass body;
a housing disposed on the base so as to surround the support member;
an elastic member disposed so as to form a space in the housing and configured to apply a force to the support member; and
a control unit configured to control a pressure of a fluid in the space by supplying the fluid to the space based on a vibration state of the target member.
 
16. A manufacturing method of an article, the manufacturing method comprising the steps of:
processing a substrate using a substrate processing apparatus; and
manufacturing the article from a processed substrate,
wherein the substrate processing apparatus includes:
a stage configured to hold the substrate; and
a vibration damping apparatus configured to damp a vibration of the stage,
wherein the vibration damping apparatus includes:
a mass body;
a base disposed on the stage;
a support member disposed on the base and configured to support the mass body;
a housing disposed on the base so as to surround the support member;
an elastic member disposed so as to form a space in the housing and configured to apply a force to the support member; and
a control unit configured to control a pressure of a fluid in the space by supplying the fluid to the space based on a vibration state of the target member.