US 12,264,409 B2
Heater assembly and single crystal puller
Qinhu Mao, Xi'an (CN)
Assigned to XI'AN ESWIN MATERIAL TECHNOLOGY CO., LTD., Xi'an (CN)
Appl. No. 18/696,822
Filed by XI'AN ESWIN MATERIAL TECHNOLOGY CO., LTD., Xi'an (CN)
PCT Filed Sep. 30, 2022, PCT No. PCT/CN2022/122982
§ 371(c)(1), (2) Date Mar. 28, 2024,
PCT Pub. No. WO2023/245909, PCT Pub. Date Dec. 28, 2023.
Claims priority of application No. 202210705520.7 (CN), filed on Jun. 21, 2022.
Prior Publication US 2024/0337043 A1, Oct. 10, 2024
Int. Cl. C30B 15/14 (2006.01); C30B 15/10 (2006.01)
CPC C30B 15/14 (2013.01) [C30B 15/10 (2013.01); Y10T 117/1032 (2015.01)] 7 Claims
OG exemplary drawing
 
1. A heater assembly for a single crystal puller, wherein the single crystal puller comprises a puller body, wherein a crucible assembly is arranged in the puller body, a bottom of the crucible assembly is supported by a support structure, the support structure comprises a support shaft, the crucible assembly is driven by the support shaft to rotate, and the heater assembly comprises:
a heating part covering an outer surface of the crucible assembly, wherein the heating part is able to rotate synchronously with the crucible assembly, the heating part comprises a plurality of connecting electrodes;
a conductive part arranged on the support shaft, wherein the conductive part comprises a plurality of annular conductive members connected to the plurality of connecting electrodes respectively, and external electrodes connected to the plurality of annular conductive members respectively, the connecting electrodes are able to rotate along the annular conductive members, and the external electrodes are connected to an external power source;
wherein the conductive part comprises a cylindrical housing sleeved on the support shaft, and a plurality of annular protrusions are arranged on an inner wall of the cylindrical housing at intervals along a circumferential direction of the cylindrical housing to serve as the annular conductive members, and the external electrodes are arranged on an outer wall of the cylindrical housing and connected to the annular protrusions respectively; and
wherein the support structure comprises a support tray supporting the bottom of the crucible assembly, the support shaft is arranged at a side of the support tray away from the crucible assembly, the connecting electrodes comprise a first sub-electrode and a second sub-electrode, the first sub-electrode is connected to the heating part, one end of the second sub-electrode is connected to the first sub-electrode, and the other end of the second sub-electrode is connected to the conductive part through a conductor which passes through the support tray and is fixed on the support shaft.