US 12,264,391 B2
Apparatus for manufacturing display device, method of manufacturing mask assembly, and method of manufacturing display device
Wonje Cho, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed on Nov. 3, 2023, as Appl. No. 18/501,708.
Application 18/501,708 is a division of application No. 17/230,867, filed on Apr. 14, 2021, granted, now 11,807,933.
Claims priority of application No. 10-2020-0099937 (KR), filed on Aug. 10, 2020.
Prior Publication US 2024/0060169 A1, Feb. 22, 2024
Int. Cl. H10K 71/16 (2023.01); C23C 14/04 (2006.01); C23C 14/06 (2006.01); C23C 14/08 (2006.01); H10K 71/20 (2023.01)
CPC C23C 14/042 (2013.01) [C23C 14/0682 (2013.01); C23C 14/08 (2013.01); H10K 71/166 (2023.02); H10K 71/231 (2023.02)] 10 Claims
OG exemplary drawing
 
1. An apparatus for manufacturing a display device, the apparatus comprising:
a mask assembly, the mask assembly comprising:
a plurality of silicon substrates, each silicon substrate of the plurality of silicon substrates comprising a first surface, a second surface opposite to the first surface, and a first opening portion penetrating the first surface and the second surface;
a support substrate on the second surface, the support substrate comprising a second opening portion connected to the first opening portion, and
a mask sheet comprising a plurality of mask opening portions, each silicon substrate being aligned with a corresponding one of the plurality of mask opening portions, and the support substrate being between the mask sheet and the plurality of silicon substrates,
wherein the first opening portion at the first surface is less in width than the first opening portion at the second surface.