US 12,264,362 B2
Optical detection for bio-entities
Allen Timothy Chang, Hsinchu (TW); Yi-Hsien Chang, Changhua County (TW); and Chun-Ren Cheng, Hsin-Chu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu (TW)
Filed on Jul. 17, 2023, as Appl. No. 18/353,603.
Application 18/353,603 is a continuation of application No. 17/111,255, filed on Dec. 3, 2020, granted, now 11,702,691.
Application 17/111,255 is a continuation of application No. 16/403,873, filed on May 6, 2019, granted, now 10,865,443, issued on Dec. 15, 2020.
Application 16/403,873 is a continuation of application No. 15/179,637, filed on Jun. 10, 2016, granted, now 10,280,456, issued on May 7, 2019.
Application 15/179,637 is a continuation of application No. 13/830,234, filed on Mar. 14, 2013, granted, now 9,366,647, issued on Jun. 14, 2016.
Prior Publication US 2023/0357839 A1, Nov. 9, 2023
Int. Cl. C12Q 1/6869 (2018.01); B01F 33/302 (2022.01); B01F 33/3031 (2022.01); B01L 3/00 (2006.01); G01N 21/03 (2006.01); G01N 21/05 (2006.01); G01N 21/64 (2006.01); G01N 27/447 (2006.01); G02B 6/122 (2006.01)
CPC C12Q 1/6869 (2013.01) [B01F 33/3021 (2022.01); B01F 33/3031 (2022.01); B01L 3/502707 (2013.01); B01L 3/502792 (2013.01); G01N 21/05 (2013.01); G01N 21/6428 (2013.01); G01N 27/44721 (2013.01); G01N 27/44791 (2013.01); B01L 2300/0654 (2013.01); B01L 2300/0819 (2013.01); B01L 2300/0867 (2013.01); B01L 2300/089 (2013.01); B01L 2300/165 (2013.01); B01L 2300/168 (2013.01); B01L 2400/0427 (2013.01); G01N 2021/0325 (2013.01); G01N 2021/058 (2013.01); G01N 2021/6482 (2013.01); G01N 2201/08 (2013.01); G02B 6/122 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A device comprising:
a first semiconductor substrate;
an inter-level dielectric (ILD) layer over the first semiconductor substrate;
a first electrode and a second electrode disposed on the ILD layer;
a first hydrophobic coating layer disposed on the ILD layer, the first electrode and the second electrode;
a surface treated structure disposed on the ILD layer between the first electrode and the second electrode;
an optical signal conduit in communication with the surface treated structure to provide an optical signal to the surface treated structure;
a photosensor array disposed in the first semiconductor substrate;
a third electrode disposed over the surface treated structure;
a second hydrophobic coating layer disposed on the third electrode; and
a fluidic channel, disposed between the first and second hydrophobic layers, wherein movement of fluid through the fluidic channel is controlled by electric fields associated with the first, second and third electrodes.