US 12,264,361 B2
Image sensor structures and related methods
Lewis Kraft, Acworth, GA (US); Craig Lee Hetherington, Foster City, CA (US); Craig M. Ciesla, Mountain View, CA (US); Michael Burek, San Diego, CA (US); Jeffrey Fisher, San Diego, CA (US); and Jason Betley, Buntingford (GB)
Assigned to Illumina, Inc., San Diego, CA (US); and Illumina Cambridge Limited, Great Abington (GB)
Filed by Illumina, Inc., San Diego, CA (US); and Illumina Cambridge Limited, Great Abington (GB)
Filed on Dec. 9, 2021, as Appl. No. 17/643,454.
Claims priority of provisional application 63/123,741, filed on Dec. 10, 2020.
Prior Publication US 2022/0186307 A1, Jun. 16, 2022
Int. Cl. C12Q 1/6869 (2018.01); H01L 27/146 (2006.01)
CPC C12Q 1/6869 (2013.01) [H01L 27/14625 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An image sensor structure, comprising:
an image layer comprising an array of light detectors disposed therein;
a device stack disposed over the image layer;
an array of light guides disposed in the device stack, each light guide associated with a light detector of the array of light detectors;
an array of nanowells disposed over the device stack, each nanowell of the array of nanowells associated with a first light guide of the array of light guides, each first light guide associated with a first light detector of the array of light detectors;
a first primer set disposed throughout a first well region of each nanowell; and
a different second primer set disposed throughout a second well region of each nanowell, the second well region adjacent the first well region at a region interface;
wherein the first and second primer sets are operable to attach a forward strand cluster of forward polynucleotide strands in the first well region and to attach an adjacent reverse strand cluster of reverse polynucleotide strands in the second well region.