US 12,264,074 B2
Synthesis of 1,1,1-trichlorodisilane
Andrew Millward, Midland, MI (US); Brian D. Rekken, Midland, MI (US); Travis Sunderland, Midland, MI (US); Jeanette K. Young, Midland, MI (US); and Xiaobing Zhou, Midland, MI (US)
Assigned to NATA SEMICONDUCTOR MATERIALS CO., LTD., Chuzhou (CN)
Appl. No. 16/710,625
Filed by NATA Semiconductor Materials CO., LTD., Chuzhou (CN)
PCT Filed Jun. 21, 2018, PCT No. PCT/US2018/038711
§ 371(c)(1), (2) Date Jan. 11, 2020,
PCT Pub. No. WO2019/005571, PCT Pub. Date Jan. 3, 2019.
Claims priority of provisional application 62/526,680, filed on Jun. 29, 2017.
Prior Publication US 2024/0253997 A1, Aug. 1, 2024
Int. Cl. C01B 33/107 (2006.01); C23C 16/24 (2006.01)
CPC C01B 33/10773 (2013.01) [C23C 16/24 (2013.01)] 13 Claims
 
1. A method of making a trihalodisilane, the method comprising:
combining a reductive effective amount of an alkylaluminum hydride, a halodisilane comprising at least 4 halogen atoms, and a solvent at a temperature <150° C. and reducing the halodisilane to form a reaction product mixture comprising a trihalodisilane, an alkylaluminum halide, and the solvent.