| CPC C01B 32/05 (2017.08) [A61L 27/08 (2013.01); A61L 27/303 (2013.01); A61L 27/50 (2013.01); C12N 5/0602 (2013.01); C23C 14/0005 (2013.01); C23C 16/01 (2013.01); C23C 16/27 (2013.01); H01M 4/8657 (2013.01); H01M 4/8803 (2013.01); H01M 4/98 (2013.01); H01M 8/1023 (2013.01); H01M 8/1039 (2013.01); H01M 8/1053 (2013.01); A61L 2420/02 (2013.01); C01P 2002/02 (2013.01); C01P 2002/04 (2013.01); C01P 2002/20 (2013.01); C01P 2006/40 (2013.01); C12N 2501/10 (2013.01); C12N 2533/00 (2013.01); H01M 2008/1095 (2013.01)] | 6 Claims |

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1. A method of forming, an article comprising:
a substrate; and
a two-dimensional (2D) amorphous carbon film disposed on a surface of the substrate, wherein the 2D amorphous carbon film has a crystallinity in a range of 0.5≤(C)≤0.8 and is homogenous, the method comprising:
decomposing a precursor gas to generate at least one decomposed species by photolytic decomposition; and
forming the 2D amorphous carbon film from the at least one decomposed species on a surface of the substrate,
wherein the precursor gas comprises a hydrocarbon as a precursor.
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