US 12,264,064 B2
Microelectromechanical system
Scott Lyall Cargill, Eb (GB)
Assigned to AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD., Shenzhen (CN)
Filed by AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD., Shenzhen (CN)
Filed on May 14, 2021, as Appl. No. 17/320,250.
Prior Publication US 2022/0363533 A1, Nov. 17, 2022
Int. Cl. B81B 3/00 (2006.01)
CPC B81B 3/0086 (2013.01) [B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0136 (2013.01); B81B 2203/0346 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A microelectromechanical system comprising:
a backplate comprising a plurality of spaced stator elements with voids formed therebetween, the stator elements comprising first conductive elements; and
a diaphragm comprising a plurality of corrugations facing the voids respectively, each corrugation comprising a groove formed at a surface thereof away from the backplate, the corrugations comprising second conductive elements and an insulating corrugation part;
wherein the diaphragm is moveable with respect to the backplate in response to a pressure exerted thereon to cause the corrugations to be moved into or out of corresponding voids, thereby changing a capacitance formed between the first and second conductive elements, the second conductive element is corrugation-shaped and embedded in the insulating corrugation part, wherein two adjacent second conductive elements are disconnected from each other such that differential signals can be output via the two adjacent second conductive elements.