US 12,264,005 B2
Wafer storage container
Bum Je Woo, Seongnam-si (KR)
Filed by Bum Je Woo, Seongnam-si (KR)
Filed on Jul. 6, 2023, as Appl. No. 18/347,989.
Claims priority of application No. 10-2022-0087943 (KR), filed on Jul. 18, 2022.
Prior Publication US 2024/0017903 A1, Jan. 18, 2024
Int. Cl. H01L 21/673 (2006.01); B65D 81/20 (2006.01)
CPC B65D 81/2076 (2013.01) [H01L 21/67389 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A wafer storage container, comprising:
a storage chamber configured to store a plurality of wafers therein through a front opening;
a left chamber forming a left surface of the storage chamber and having a left hole on an inner surface thereof;
a right chamber forming a right surface of the storage chamber and having a right hole on an inner surface thereof;
a rear chamber forming a rear surface of the storage chamber and having a rear hole on an inner surface thereof;
a left rear chamber connecting the left chamber and the rear chamber, forming a left rear surface of the storage chamber, and having a left rear hole on an inner surface thereof;
a right rear chamber connecting the right chamber and the rear chamber, forming a right rear surface of the storage chamber, and having a right rear hole on an inner surface thereof;
a left gas supply part configured to supply a purge gas to the left chamber and the left rear chamber so that the purge gas is injected into the storage chamber through the left hole and the left rear hole;
a rear gas supply part configured to supply the purge gas to the rear chamber and the right rear chamber so that the purge gas is injected into the storage chamber through the rear hole and the right rear hole; and
a right gas exhaust part configured to transmit a suction force to the right chamber so that the purge gas inside the storage chamber is exhausted through the right hole.