US 12,263,587 B2
Dual arm robot
Robert T. Caveney, Windham, NH (US); Alexander G. Krupyshev, Chelmsford, MA (US); Martin R. Elliot, Austin, TX (US); and Christopher Hofmeister, Harleyville, PA (US)
Assigned to Brooks Automation US, LLC, Chelmsford, MA (US)
Filed by BROOKS AUTOMATION US, LLC, Chelmsford, MA (US)
Filed on Mar. 28, 2023, as Appl. No. 18/191,472.
Application 18/191,472 is a division of application No. 16/990,775, filed on Aug. 11, 2020, granted, now 11,613,002.
Application 16/990,775 is a division of application No. 15/489,449, filed on Apr. 17, 2017, granted, now 10,737,381, issued on Aug. 11, 2020.
Application 15/489,449 is a continuation of application No. 13/293,717, filed on Nov. 10, 2011, granted, now 9,623,555, issued on Apr. 18, 2017.
Claims priority of provisional application 61/451,912, filed on Mar. 11, 2011.
Claims priority of provisional application 61/412,218, filed on Nov. 10, 2010.
Prior Publication US 2023/0330839 A1, Oct. 19, 2023
Int. Cl. B25J 9/04 (2006.01)
CPC B25J 9/043 (2013.01) [B25J 9/042 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A substrate processing apparatus comprises:
a frame;
a first transport arm connected to the frame and having a first upper arm link, a first forearm link rotatably coupled to the first upper arm link and at least one end effector rotatably coupled to the first forearm link; and
a second transport arm connected to the frame and having a second upper arm link, a second forearm link rotatably coupled to the first upper arm link and at least one end effector rotatably coupled to the second forearm link;
wherein the first upper arm link and the second upper arm link are connected to the frame by and pivot about a common axis of rotation, and each of the at least one end effector is slaved to a respective upper arm link and the at least one end effector of the first transport arm is arranged at a lateral offset relative to the at least one end effector of the second transport arm.