US 12,263,452 B2
Gas solution supply device
Suguru Ozawa, Tokyo (JP); Yuji Araki, Tokyo (JP); Toshifumi Watanabe, Tokyo (JP); Yoichi Nakagawa, Tokyo (JP); Risa Kimura, Tokyo (JP); and Tao Xu, Tokyo (JP)
Assigned to EBARA CORPORATION, Tokyo (JP)
Filed by EBARA CORPORATION, Tokyo (JP)
Filed on Sep. 29, 2021, as Appl. No. 17/488,814.
Claims priority of application No. 2020-167237 (JP), filed on Oct. 1, 2020; and application No. 2021-092452 (JP), filed on Jun. 1, 2021.
Prior Publication US 2022/0105478 A1, Apr. 7, 2022
Int. Cl. B01F 23/00 (2022.01); B01D 19/00 (2006.01); B01F 23/232 (2022.01); B01F 23/70 (2022.01); B01F 23/80 (2022.01); B01F 25/31 (2022.01); B01F 25/51 (2022.01); B01F 35/221 (2022.01); B01F 35/71 (2022.01); B01F 23/237 (2022.01); B01F 101/58 (2022.01); H01L 21/02 (2006.01)
CPC B01F 23/2323 (2022.01) [B01D 19/0063 (2013.01); B01D 19/0068 (2013.01); B01F 23/703 (2022.01); B01F 23/803 (2022.01); B01F 25/31 (2022.01); B01F 25/51 (2022.01); B01F 35/2211 (2022.01); B01F 35/7176 (2022.01); B01F 35/718051 (2022.01); B01F 23/237613 (2022.01); B01F 2101/58 (2022.01); H01L 21/02041 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A gas solution supply device comprising:
a first gas-liquid separator in which gas solution is stored;
a second gas-liquid separator which is provided at a stage subsequent to the first gas-liquid separator and in which gas solution to be supplied to a use point is stored;
an intermediate line provided between the first gas-liquid separator and the second gas-liquid separator;
a pressure booster pump that is provided on the intermediate line and increases a pressure of gas solution being supplied from the first gas-liquid separator to the second gas-liquid separator;
a gas supply line that supplies gas as a material of the gas solution; and
a first gas dissolving unit that is provided on the intermediate line and dissolves the gas supplied from the gas supply line in the gas solution supplied from the first gas-liquid separator,
wherein the first gas-liquid separator comprises a liquid supply line through which liquid as a material of the gas solution is supplied, the liquid supply line comprising a second gas dissolving unit that dissolves undissolved excess gas discharged from the second gas-liquid separator in the liquid as a material of the gas solution.