US 11,943,584 B2
MEMS microphone
Chih-Yuan Chen, Tainan (TW); Jien-Ming Chen, Tainan (TW); Feng-Chia Hsu, Tainan (TW); Wen-Shan Lin, Tainan (TW); and Nai-Hao Kuo, Tainan (TW)
Assigned to FORTEMEDIA, INC., Alviso, CA (US)
Filed by Fortemedia, Inc., Santa Clara, CA (US)
Filed on Apr. 7, 2022, as Appl. No. 17/715,278.
Claims priority of provisional application 63/238,857, filed on Aug. 31, 2021.
Prior Publication US 2023/0063234 A1, Mar. 2, 2023
Int. Cl. H04R 19/04 (2006.01); B81B 3/00 (2006.01); H04R 7/04 (2006.01); H04R 7/16 (2006.01)
CPC H04R 19/04 (2013.01) [B81B 3/001 (2013.01); B81B 3/0051 (2013.01); B81B 3/0072 (2013.01); H04R 7/04 (2013.01); H04R 7/16 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/019 (2013.01); H04R 2201/003 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A micro-electro-mechanical system (MEMS) microphone, comprising:
a substrate having an opening portion;
a diaphragm disposed on one side of the substrate and extending across the opening portion of the substrate;
a backplate comprising a plurality of acoustic holes disposed on one side of the diaphragm and forming an air gap with the diaphragm; and
a first protrusion extending from the backplate towards the air gap, wherein the first protrusion forms a polyline or a curve from a top view, and a distance between the first protrusion and the diaphragm is greater than 0.1 μm.