US 11,942,922 B2
Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
Bryant Garcia, Mississauga (CA); Ventsislav Yantchev, Sofia (BG); Patrick Turner, San Bruno, CA (US); Viktor Plesski, Gorgier (CH); Julius Koskela, Helsinki (FI); Soumya Yandrapalli, Lausanne (CH); Neal Fenzi, Santa Barbara, CA (US); and Robert B. Hammond, Santa Barbara, CA (US)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Mar. 16, 2022, as Appl. No. 17/696,105.
Application 17/696,105 is a continuation of application No. 17/560,889, filed on Dec. 23, 2021.
Application 17/560,889 is a continuation in part of application No. 17/460,737, filed on Aug. 30, 2021.
Application 17/460,737 is a continuation in part of application No. 17/388,745, filed on Jul. 29, 2021.
Application 17/388,745 is a continuation in part of application No. 17/351,204, filed on Jun. 17, 2021.
Application 17/351,204 is a continuation in part of application No. 17/229,767, filed on Apr. 13, 2021.
Application 17/229,767 is a continuation in part of application No. 17/217,923, filed on Mar. 30, 2021.
Application 17/217,923 is a continuation in part of application No. 17/169,155, filed on Feb. 5, 2021.
Application 17/169,155 is a continuation in part of application No. 16/989,710, filed on Aug. 10, 2020, granted, now 11,323,089.
Application 16/989,710 is a continuation in part of application No. 17/022,042, filed on Sep. 15, 2020, granted, now 11,323,090.
Application 17/022,042 is a continuation in part of application No. 17/122,977, filed on Dec. 15, 2020, granted, now 11,509,279.
Application 17/122,977 is a continuation in part of application No. 17/115,765, filed on Dec. 8, 2020.
Application 17/351,204 is a continuation of application No. 17/030,066, filed on Sep. 23, 2020, granted, now 11,146,232, issued on Oct. 21, 2021.
Application 17/030,066 is a continuation in part of application No. 16/920,173, filed on Jul. 2, 2020, granted, now 11,139,794, issued on Oct. 5, 2021.
Application 17/115,765 is a continuation of application No. 16/933,224, filed on Jul. 20, 2020, granted, now 10,911,023, issued on Feb. 2, 2021.
Application 17/169,155 is a continuation in part of application No. 16/930,534, filed on Jul. 16, 2020, granted, now 11,323,096.
Application 16/930,534 is a continuation in part of application No. 16/689,707, filed on Nov. 20, 2019, granted, now 10,917,070, issued on Feb. 9, 2021.
Application 17/460,737 is a continuation of application No. 16/805,471, filed on Feb. 28, 2020, granted, now 11,206,009, issued on Dec. 21, 2021.
Application 17/022,042 is a continuation in part of application No. 16/782,971, filed on Feb. 5, 2020, granted, now 10,790,802, issued on Sep. 29, 2020.
Application 16/782,971 is a continuation in part of application No. 16/689,707, filed on Nov. 20, 2019, granted, now 10,917,070, issued on Feb. 9, 2021.
Application 16/689,707 is a continuation in part of application No. 16/829,617, filed on Mar. 25, 2020, granted, now 10,868,512, issued on Dec. 15, 2020.
Application 16/829,617 is a continuation of application No. 16/578,811, filed on Sep. 23, 2019, granted, now 10,637,438, issued on Apr. 28, 2020.
Application 16/578,811 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 16/782,971 is a continuation in part of application No. 16/438,141, filed on Jun. 11, 2019, granted, now 10,601,392, issued on Mar. 24, 2020.
Application 16/438,141 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 16/782,971 is a continuation in part of application No. 16/689,707, filed on Nov. 20, 2019, granted, now 10,917,070, issued on Feb. 9, 2021.
Application 16/920,173 is a continuation of application No. 16/438,121, filed on Jun. 11, 2019, granted, now 10,756,697, issued on Aug. 25, 2020.
Application 16/438,121 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 16/689,707 is a continuation of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 16/989,710 is a continuation in part of application No. 16/438,121, filed on Jun. 11, 2019, granted, now 10,756,697, issued on Aug. 25, 2020.
Claims priority of provisional application 63/144,977, filed on Feb. 3, 2021.
Claims priority of provisional application 63/112,395, filed on Nov. 11, 2020.
Claims priority of provisional application 63/088,344, filed on Oct. 6, 2020.
Claims priority of provisional application 63/081,169, filed on Sep. 21, 2020.
Claims priority of provisional application 63/074,991, filed on Sep. 4, 2020.
Claims priority of provisional application 63/066,520, filed on Aug. 17, 2020.
Claims priority of provisional application 63/053,584, filed on Jul. 18, 2020.
Claims priority of provisional application 63/026,824, filed on May 19, 2020.
Claims priority of provisional application 63/012,849, filed on Apr. 20, 2020.
Claims priority of provisional application 62/993,586, filed on Mar. 23, 2020.
Claims priority of provisional application 62/978,133, filed on Feb. 18, 2020.
Claims priority of provisional application 62/951,452, filed on Dec. 20, 2019.
Claims priority of provisional application 62/904,386, filed on Sep. 23, 2019.
Claims priority of provisional application 62/904,133, filed on Sep. 23, 2019.
Claims priority of provisional application 62/892,871, filed on Aug. 28, 2019.
Claims priority of provisional application 62/874,709, filed on Jul. 16, 2019.
Claims priority of provisional application 62/818,564, filed on Mar. 14, 2019.
Claims priority of provisional application 62/753,815, filed on Oct. 31, 2018.
Claims priority of provisional application 62/753,809, filed on Oct. 31, 2018.
Claims priority of provisional application 62/748,883, filed on Oct. 22, 2018.
Claims priority of provisional application 62/741,702, filed on Oct. 5, 2018.
Claims priority of provisional application 62/701,363, filed on Jul. 20, 2018.
Claims priority of provisional application 62/685,825, filed on Jun. 15, 2018.
Prior Publication US 2022/0209740 A1, Jun. 30, 2022
Int. Cl. H03H 9/17 (2006.01); H03H 9/02 (2006.01); H03H 9/54 (2006.01); H03H 9/13 (2006.01)
CPC H03H 9/171 (2013.01) [H03H 9/02 (2013.01); H03H 9/54 (2013.01); H03H 9/02015 (2013.01); H03H 9/13 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An acoustic resonator device comprising:
a substrate;
a lithium niobate plate having front and back surfaces, the back surface facing the substrate, a portion of the lithium niobate plate forming a diaphragm that is over a cavity of the acoustic resonator device; and
an interdigital transducer (IDT) at the lithium niobate plate such that interleaved fingers of the IDT are on the diaphragm, the IDT and the lithium niobate plate configured such that a radio frequency signal applied to the IDT excites a primary shear acoustic mode in the diaphragm;
wherein Euler angles of the lithium niobate plate are [0°, β, 0°], where β is greater than or equal to 40° and less than or equal to 70°
wherein a first pitch/mark zone of the interleaved fingers has a pitch between a pair of adjacent interleaved fingers equal to a first pitch value P1 and a mark of at least one of the interleaved fingers equal to a first mark value M1; and
wherein a second pitch/mark zone of the interleaved fingers has a pitch between a pair of adjacent interleaved fingers equal to a second pitch value P2 not equal to P1 and a mark of at least one of the interleaved fingers equal to a second mark value M2 not equal to M1.