CPC H01S 5/18394 (2013.01) [H01S 5/18311 (2013.01); H01S 5/18377 (2013.01)] | 14 Claims |
1. A surface light emitting laser device comprising:
a first electrode;
a substrate disposed on the first electrode;
a first reflection layer disposed on the substrate;
an active region disposed on the first reflection layer and including a cavity;
an opening region disposed on the active region and including an aperture and an insulating region;
a second reflection layer disposed on the opening region;
a second electrode disposed on the second reflection layer; and
a delta doping layer disposed in the opening region,
wherein a thickness of the insulating region becomes thinner into the aperture direction,
wherein the delta doped layer is disposed in the aperture,
wherein the aperture includes first AlGa-based layers and a second AlGa-based layer, the second AlGa-based layer is disposed between the first AlGa-based layers, and a second Al concentration of the second AlGa-based layer is higher than a first Al concentration of the first AlGa-based layers, and
wherein the delta doped layer is disposed directly on the second AlGa-based layer, and is different from the first and second AlGa-based layers.
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