US 11,942,750 B2
Laser inspection system
Yi-Chi Lee, Hsinchu (TW); Hsin-Chia Su, Hsinchu (TW); Shih-Ting Lin, Hsinchu (TW); Yu-Cheng Song, Hsinchu (TW); Fu-Shun Ho, Hsinchu (TW); and Chih-Chun Chen, Hsinchu (TW)
Assigned to INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, Hsinchu (TW)
Filed by INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, Hsinchu (TW)
Filed on Nov. 23, 2020, as Appl. No. 17/101,081.
Claims priority of application No. 109137339 (TW), filed on Oct. 27, 2020.
Prior Publication US 2022/0131326 A1, Apr. 28, 2022
Int. Cl. H01S 3/00 (2006.01); G02B 6/293 (2006.01); H01S 3/067 (2006.01); H01S 3/16 (2006.01)
CPC H01S 3/0014 (2013.01) [G02B 6/29389 (2013.01); H01S 3/06708 (2013.01); H01S 3/1608 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A laser inspection system, comprising:
a plurality of laser sources emitting lasers with a first spectrum;
at least one combiner connected with the plurality of laser sources via a plurality of first optical fibers, the at least one combiner combining the first optical fibers together;
a laser exiting portion connected with the at least one combiner via at least one second optical fiber;
a plurality of gain optical fibers disposed at each of the plurality of first optical fibers and at the at least one second optical fiber, respectively; and
a plurality of light detectors disposed at the plurality of gain optical fibers,
wherein when the lasers with the first spectrum pass through the plurality of gain optical fibers, parts of energy levels of the lasers with the first spectrum are absorbed by the gain optical fibers, such that the lasers with the first spectrum are converted to generate lights with a second spectrum, and intensities of the lights with the second spectrum are detected by the plurality of light detectors.