US 11,942,456 B2
Display formed by curing of color conversion layer in recess
Daihua Zhang, Los Altos, CA (US); Yingdong Luo, Newark, CA (US); Mingwei Zhu, San Jose, CA (US); Hou T. Ng, Campbell, CA (US); Sivapackia Ganapathiappan, Los Altos, CA (US); and Nag B. Patibandla, Pleasanton, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jan. 28, 2022, as Appl. No. 17/587,524.
Application 17/587,524 is a division of application No. 16/416,098, filed on May 17, 2019, granted, now 11,239,213.
Prior Publication US 2022/0189933 A1, Jun. 16, 2022
Int. Cl. H01L 25/075 (2006.01); H01L 33/00 (2010.01); H01L 33/32 (2010.01); H01L 33/50 (2010.01)
CPC H01L 25/0753 (2013.01) [H01L 33/0075 (2013.01); H01L 33/32 (2013.01); H01L 33/504 (2013.01); H01L 2933/0033 (2013.01); H01L 2933/0041 (2013.01); H01L 2933/0058 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A multi-color display, comprising:
a backplane having backplane circuitry;
a plurality of micro-light emitting diodes (micro-LEDs) arranged in an array and electrically integrated with the backplane circuitry of the backplane, the micro-LEDs of the array including diode structures configured to generate illumination of the same wavelength range;
a cover layer covering and spanning the array of micro-LEDs, the cover layer having a single-layer structure, the cover layer having a plurality of recesses in an outer surface of the cover layer on a side of the cover layer farther from the diode structures, each recess of the plurality of recesses positioned over a corresponding micro-LED of the plurality of micro-LEDs;
a first color conversion layer in each recess over a first plurality of the diode structures to convert the illumination that passes through the cover layer from the first plurality of the diode structures to light of a first color;
a second color conversion layer in each recess over a second plurality of the diode structures to convert the illumination that passes through the cover layer from the second plurality of the diode structures to light of a second color different from the first color; and
a plurality of optical isolation structures formed on the backplane between adjacent micro-LEDs of the array of micro-LEDs below the cover layer, the optical isolation structures extending to a depth into a multiplicity of recesses in a lower surface of the cover layer on a side of the cover layer closer to the diode structures, the optical isolation structures being configured to optically isolate the first color conversion layer from illumination generated by the second plurality of the diode structures and the second color conversion layer from illumination generated by the first plurality of the diode structures.