US 11,942,357 B2
Workpiece placement apparatus and processing apparatus
Yohei Uchida, Miyagi (JP); Naoki Sugawa, Miyagi (JP); Katsushi Abe, Miyagi (JP); and Tsuyoshi Hida, Miyagi (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Jul. 7, 2022, as Appl. No. 17/811,121.
Application 17/811,121 is a division of application No. 16/293,788, filed on Mar. 6, 2019, granted, now 11,410,871.
Claims priority of application No. 2018-041231 (JP), filed on Mar. 7, 2018.
Prior Publication US 2022/0336257 A1, Oct. 20, 2022
Int. Cl. H01L 21/687 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/68735 (2013.01) [H01J 37/32715 (2013.01); H01L 21/67069 (2013.01); H01L 21/67109 (2013.01); H01L 21/67126 (2013.01); H01L 21/6831 (2013.01); H01L 21/68785 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A placement apparatus for placing a workpiece in a processing vessel, the placement apparatus comprising:
a stage on which the workpiece can be placed, the stage including an electrostatic chuck, the electrostatic chuck including a base member and a dielectric layer disposed on the base member;
an edge ring disposed on the stage so as to surround a periphery of the workpiece;
an electrically conductive connecting member provided around outer circumferences of the edge ring and the stage, an entirety of the electrically conductive connecting member being situated further out in a radial direction than an outermost circumference of the edge ring;
a first contacting member provided between the edge ring and the electrically conductive connecting member so as to be in contact with the electrically conductive connecting member and an outermost circumferential side surface of the edge ring; and
a second contacting member provided at a position lower than the first contacting member, so as to be in contact with the stage, the second contacting member being sandwiched in the radial direction between, and in contact with, the electrically conductive connecting member and the base member.