US 11,942,348 B2
Wafer notch positioning detection
Kai-An Chuang, Miaoli (TW); Kuang-Wei Hsueh, Zhubei (TW); Shih-Huan Chen, Zhubei (TW); and Yung-Shu Kao, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Dec. 2, 2022, as Appl. No. 18/060,981.
Application 18/060,981 is a continuation of application No. 16/947,850, filed on Aug. 20, 2020, granted, now 11,521,882.
Prior Publication US 2023/0096018 A1, Mar. 30, 2023
Int. Cl. H01L 21/68 (2006.01); G01B 7/31 (2006.01)
CPC H01L 21/681 (2013.01) [G01B 7/31 (2013.01); H01L 21/682 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A device, comprising:
a reflector to direct a beam of light;
a light gate comprising a partial enclosure comprising an opening to permit the beam of light, reflected from the reflector, to travel through the opening, wherein the partial enclosure resides at least partially over the reflector; and
a light sensor to convert at least a portion of the beam of light, received from the opening of the light gate, into an electrical signal.