US 11,940,740 B2
Methods and apparatus for obtaining diagnostic information relating to an industrial process
Alexander Ypma, Veldhoven (NL); Jasper Menger, Eindhoven (NL); David Deckers, Turnhout (BE); David Han, Tilburg (NL); Adrianus Cornelis Matheus Koopman, Hilversum (NL); Irina Lyulina, Son (NL); Scott Anderson Middlebrooks, Veldhoven (NL); Richard Johannes Franciscus Van Haren, Waalre (NL); and Jochem Sebastiaan Wildenberg, Aarle-Rixtel (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Jun. 9, 2022, as Appl. No. 17/836,099.
Application 17/836,099 is a continuation of application No. 16/864,456, filed on May 1, 2020, granted, now 11,385,550.
Application 16/864,456 is a continuation of application No. 16/351,873, filed on Mar. 13, 2019, granted, now 10,642,162.
Application 16/351,873 is a continuation of application No. 15/915,674, filed on Mar. 8, 2018, granted, now 10,274,834.
Application 15/915,674 is a continuation of application No. 15/025,856, granted, now 9,946,165, previously published as PCT/EP2014/068932, filed on Sep. 5, 2014.
Claims priority of provisional application 61/885,977, filed on Oct. 2, 2013.
Prior Publication US 2022/0326623 A1, Oct. 13, 2022
Int. Cl. G03F 7/00 (2006.01); G06F 16/26 (2019.01); G03F 9/00 (2006.01)
CPC G03F 7/706837 (2023.05) [G03F 7/70525 (2013.01); G03F 7/70616 (2013.01); G03F 9/7092 (2013.01); G06F 16/26 (2019.01)] 20 Claims
OG exemplary drawing
 
1. A method comprising:
obtaining measurement data of a substrate;
obtaining a plurality of fingerprint components from historic measurement data comprising values of a parameter measured at a plurality of positions on from previous substrates similar to the substrate;
determining a linear combination of the fingerprint components that fits the measurement data best;
reconstructing, by a hardware computer, a fingerprint of the parameter across the substrate based on the determined linear combination; and
based on the reconstructed fingerprint associated with the substrate information, outputting electronic data for configuration or modification of an industrial process or of a measurement process of substrates subjected to the industrial process.