CPC G01N 23/2055 (2013.01) [G01N 23/20008 (2013.01); G01N 23/20025 (2013.01); G01N 23/20058 (2013.01); G01N 23/20083 (2013.01); G01N 23/20091 (2013.01); G01N 23/203 (2013.01); G01N 23/205 (2013.01); G01N 23/207 (2013.01); G01N 23/2206 (2013.01); G01N 23/2252 (2013.01); G01N 23/2254 (2013.01); G06V 10/48 (2022.01); G01N 2223/053 (2013.01); G01N 2223/056 (2013.01); G01N 2223/0565 (2013.01); G01N 2223/0566 (2013.01); G01N 2223/071 (2013.01); G01N 2223/079 (2013.01); G01N 2223/08 (2013.01); G01N 2223/102 (2013.01); G01N 2223/401 (2013.01); G01N 2223/605 (2013.01); G01N 2223/607 (2013.01)] | 14 Claims |
1. A method for improving an EBSD/TKD map comprising a plurality of data points, each data point being assigned to a corresponding grid point of a sample grid and representing crystal information based on a Kikuchi pattern detected for the grid point, the method comprising:
determining a defective data point of the EBSD/TKD map and a plurality of non-defective neighboring data points of the defective data point;
comparing Kikuchi bands of a Kikuchi pattern detected for a grid point corresponding to the defective data point with at least one simulated Kikuchi pattern corresponding to crystal information of the plurality of non-defective neighboring data points; and
assigning crystal information of one of the plurality of non-defective neighboring data points to the defective data point based on the comparing.
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