	US 11,940,347 B2
	Pressure sensor
Hiroshi Kodama, Tokyo (JP); Naoki Yoshida, Tokyo (JP); Kaori Miyashita, Tokyo (JP); Eiji Takeda, Tokyo (JP); Nobuaki Yamada, Tokyo (JP); Yoshihiro Tomomatsu, Tokyo (JP); Yasushi Yanagisawa, Tokyo (JP); Yusuke Midorikawa, Tokyo (JP); Shirou Kamanaru, Kariya (JP); Kenichi Yokoyama, Kariya (JP); Inao Toyoda, Kariya (JP); Hisayuki Takeuchi, Kariya (JP); Naohisa Niimi, Kariya (JP); Masao Takahashi, Kariya (JP); Yasutake Ura, Kariya (JP); Kouji Asano, Kariya (JP); and Yukihiro Kamada, Kariya (JP)
Assigned to DENSO CORPORATION, Kariya (JP); and NAGANO KEIKI CO., LTD., Tokyo (JP)
Filed by DENSO CORPORATION, Kariya (JP); and NAGANO KEIKI CO., LTD., Tokyo (JP)
Filed on Oct. 22, 2021, as Appl. No. 17/508,249.
Application 17/508,249 is a continuation of application No. PCT/JP2020/017819, filed on Apr. 24, 2020.
Claims priority of application No. 2019-085904 (JP), filed on Apr. 26, 2019; and application No. 2020-071350 (JP), filed on Apr. 10, 2020.
Prior Publication US 2022/0042868 A1, Feb. 10, 2022
Int. Cl. G01L 9/14 (2006.01); G01L 9/00 (2006.01); G01L 9/04 (2006.01); G01L 19/00 (2006.01); G01L 19/14 (2006.01); G01L 23/18 (2006.01); G01L 1/22 (2006.01); G01L 9/06 (2006.01)

CPC G01L 9/04 (2013.01) [G01L 19/0061 (2013.01); G01L 19/147 (2013.01); G01L 19/148 (2013.01)]

4 Claims

1. A pressure sensor that detects a pressure of a pressure medium, comprising: a stem having a pressure introduction hole into which the pressure medium is introduced, and a diaphragm that is deformable according to the pressure of the pressure medium; and a strain detecting element being arranged on the diaphragm via an insulating film and being configured to output a detection signal according to the deformation of the diaphragm, wherein the strain detecting element has a portion made of polysilicon, and a doping layer having a higher electrical resistivity than the polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film and the strain detecting element.