US 11,939,268 B2
Low-k material and method for manufacturing the same
Kuo-Chuang Chiu, Hsinchu (TW); Tzu-Yu Liu, Zhubei (TW); Tien-Heng Huang, Tainan (TW); Tzu-Chi Chou, Hsinchu (TW); and Cheng-Ting Lin, Xinyuan Township (TW)
Assigned to INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, Hsinchu (TW)
Filed by INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, Hsinchu (TW)
Filed on Dec. 23, 2020, as Appl. No. 17/133,270.
Claims priority of provisional application 62/955,677, filed on Dec. 31, 2019.
Prior Publication US 2021/0198154 A1, Jul. 1, 2021
Int. Cl. C04B 35/64 (2006.01); C04B 35/14 (2006.01); C04B 35/628 (2006.01)
CPC C04B 35/64 (2013.01) [C04B 35/14 (2013.01); C04B 35/62807 (2013.01); C04B 2235/5204 (2013.01); C04B 2235/5436 (2013.01); C04B 2235/5445 (2013.01); C04B 2235/96 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A low-k material, comprising:
a first ceramic with a low melting point dispersed in a second ceramic with a low melting point and a low dielectric constant, wherein the second ceramic are connected to form a network structure of a microcrystal phase,
wherein the first ceramic comprises (1) silicon oxide, magnesium oxide, aluminum oxide, calcium oxide, boron oxide, and zinc oxide,
wherein the silicon oxide and the magnesium oxide have a weight ratio of 100:0 to 100:85,
wherein the silicon oxide and the aluminum oxide have a weight ratio of 100:20 to 100:150,
wherein the silicon oxide and the calcium oxide have a weight ratio of 100:2 to 100:20,
wherein the silicon oxide and the boron oxide have a weight ratio of 100:2 to 100:70, and
wherein the silicon oxide and the zinc oxide have a weight ratio of 100:2 to 100:70;
or
wherein the first ceramic comprises (2) silicon oxide, aluminum oxide, calcium oxide, and boron oxide,
wherein the silicon oxide and the aluminum oxide have a weight ratio of 100:15 to 100:25,
wherein the silicon oxide and the calcium oxide have a weight ratio of 100:10 to 100:25, and
wherein the silicon oxide and the boron oxide have a weight ratio of 100:30 to 100:50.