US 11,939,173 B2
Transportation head for microchip transfer device, microchip transfer device having same, and transfer method thereby
Dahl-Young Khang, Paju-si (KR); Sung-Hwan Hwang, Paju-si (KR); Jia Lee, Paju-si (KR); Sung-Soo Yoon, Paju-si (KR); Su Seok Choi, Paju-si (KR); Kiseok Chang, Paju-si (KR); Jeong Min Moon, Paju-si (KR); Soon Shin Jung, Paju-si (KR); Sungpil Ryu, Paju-si (KR); and Jihwan Jung, Paju-si (KR)
Assigned to LG DISPLAY CO., LTD., Seoul (KR)
Appl. No. 17/270,725
Filed by LG Display Co., Ltd., Seoul (KR)
PCT Filed Aug. 23, 2019, PCT No. PCT/KR2019/010779
§ 371(c)(1), (2) Date Feb. 23, 2021,
PCT Pub. No. WO2020/040605, PCT Pub. Date Feb. 27, 2020.
Claims priority of application No. 10-2018-0098468 (KR), filed on Aug. 23, 2018.
Prior Publication US 2021/0339964 A1, Nov. 4, 2021
Int. Cl. H01L 21/67 (2006.01); B65G 47/90 (2006.01); H01L 21/677 (2006.01)
CPC B65G 47/90 (2013.01) [H01L 21/67721 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A transportation head for a microchip transfer apparatus, comprising:
a head body having a plurality of pickup regions and a plurality of dummy regions being non-pickup regions and each pickup region disposed between two dummy regions;
a plurality of first protruding pins disposed in each pickup region of the head body;
one or more second protruding pins disposed to be spaced apart from each other in each dummy region of the head body; and
a liquid droplet attached to the plurality of first protruding pins,
wherein the liquid droplet is not attached to the one or more second protruding pins, and
wherein the plurality of first protruding pins arranged to be spaced apart from each other in a first direction and a second direction intersecting the first direction in a matrix form in each pickup region of the head body, and
wherein the one or more second protruding pins have a same height as each of the plurality of first protruding pins.