US 11,938,588 B2
Control method of grinding water flow rate during double side grinding process
Chien-Ming Chen, Taiwan (CN); and Kin Peng Low, Lorong (SG)
Assigned to Zhonghuan Advanced Semiconductor Technology Co., Ltd., Jiangsu (CN)
Filed by ZHONGHUAN ADVANCED SEMICONDUCTOR MATERIALS CO., LTD., Jiangsu (CN)
Filed on Mar. 5, 2021, as Appl. No. 17/192,918.
Claims priority of application No. 202010152622.1 (CN), filed on Mar. 6, 2020.
Prior Publication US 2021/0276150 A1, Sep. 9, 2021
Int. Cl. B24B 57/02 (2006.01); B24B 37/005 (2012.01); B24B 37/08 (2012.01)
CPC B24B 57/02 (2013.01) [B24B 37/005 (2013.01); B24B 37/08 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A control method of a grinding water flow rate during a double side grinding process, wherein a double side grinder used comprises a grinding wheel, a feed unit and a water supply device, a water inlet being provided on the feed unit, the control method comprising:
preparing for grinding and completing an installation of a workpiece according to an operation procedure of the double side grinder;
during a process of double side grinding, setting a flow rate of the water inlet to decrease with a shortening of a teeth length of the grinding wheel, with the flow rate of the water inlet being set to have a linear relationship with the teeth length of the grinding wheel;
wherein a functional relationship between the teeth length of the grinding wheel and the flow rate of the water inlet is:

OG Complex Work Unit Math
wherein:
Q is the flow rate of the water inlet at a single side, and a unit is Litres/minute;
K is a minimum set water quantity when the teeth length of the grinding wheel is at a maximum teeth length, and a unit is Litres/minute;
P is a minimum set water quantity when the teeth length of the grinding wheel is at a minimum teeth length, and a unit is Litres/minute;
Xm is the maximum teeth length of the grinding wheel, and a unit is mm; and
X is the teeth length of the grinding wheel, and a unit is mm;
wherein the teeth length X of the grinding wheel is from 0.1 mm to 6 mm;
the water flow rate control method further comprises: monitoring the teeth length of the grinding wheel in real time during a grinding process of the workpiece and transmitting the teeth length X of the grinding wheel to a controller, wherein the teeth length X of the grinding wheel during the grinding process satisfies: X=Xm−(S−M/2),
wherein:
S is a position change of the grinding wheel, and a unit is mm;
M is a grinding thickness of the workpiece, and a unit is mm.