US 12,262,595 B2
Manufacturing method of organic light emitting diode display device having multilayer conductive layer
Sang-Ho Moon, Cheonan-si (KR); Chun Gi You, Asan-si (KR); and Tae Kon Kim, Asan-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on Aug. 30, 2022, as Appl. No. 17/899,554.
Application 17/899,554 is a division of application No. 16/848,481, filed on Apr. 14, 2020, granted, now 11,462,601.
Claims priority of application No. 10-2019-0072844 (KR), filed on Jun. 19, 2019.
Prior Publication US 2022/0415984 A1, Dec. 29, 2022
Int. Cl. H10K 59/123 (2023.01); H10K 50/814 (2023.01); H10K 59/121 (2023.01); H10K 59/131 (2023.01); H10K 71/00 (2023.01); H10K 71/20 (2023.01); H01L 27/12 (2006.01); H01L 29/786 (2006.01); H10K 59/12 (2023.01)
CPC H10K 59/123 (2023.02) [H10K 50/814 (2023.02); H10K 59/1213 (2023.02); H10K 59/1216 (2023.02); H10K 59/131 (2023.02); H10K 71/00 (2023.02); H10K 71/231 (2023.02); H01L 27/1225 (2013.01); H01L 27/124 (2013.01); H01L 27/1255 (2013.01); H01L 27/1259 (2013.01); H01L 29/7869 (2013.01); H10K 59/1201 (2023.02)] 6 Claims
OG exemplary drawing
 
1. A method for manufacturing an organic light emitting diode display, the method comprising:
providing a substrate;
forming an inorganic insulating layer on the substrate;
forming a third conductive layer on the inorganic insulating layer;
forming a first organic layer on the third conductive layer;
forming a fourth conductive layer on the first organic layer, the forming the fourth conductive layer further includes forming a plurality of metal layers, and the plurality of metal layers is etched by a dry etching process to form a middle layer and an upper layer of the fourth conductive layer;
forming a second organic layer on the first organic layer to cover the fourth conductive layer; and
forming an anode on the second organic layer,
wherein the fourth conductive layer is connected between the third conductive layer and the anode, and
wherein the forming the fourth conductive layer includes at least one of the dry etching process and a wet etching process.