US 12,262,481 B2
Electrical devices with electrodes on softening polymers and methods of manufacturing thereof
Romil Modi, Austin, TX (US); Jonathan Reeder, Austin, TX (US); Gregory T. Ellson, Austin, TX (US); Walter E. Voit, Austin, TX (US); and Alexandra Joshi Imre, Austin, TX (US)
Assigned to Board of Regents, The University of Texas System, Austin, TX (US)
Filed by Board of Regents, The University of Texas System, Austin, TX (US)
Filed on Jan. 2, 2024, as Appl. No. 18/402,529.
Application 18/402,529 is a division of application No. 18/102,060, filed on Jan. 26, 2023, granted, now 11,991,836.
Application 18/102,060 is a division of application No. 16/591,002, filed on Oct. 2, 2019, granted, now 11,596,072, issued on Feb. 8, 2023.
Application 16/591,002 is a division of application No. 15/794,863, filed on Oct. 26, 2017, granted, now 10,485,109, issued on Oct. 30, 2019.
Claims priority of provisional application 62/414,532, filed on Oct. 28, 2016.
Prior Publication US 2024/0188224 A1, Jun. 6, 2024
Int. Cl. H05K 3/40 (2006.01); H05K 1/03 (2006.01); H05K 1/09 (2006.01); H05K 1/11 (2006.01); H05K 3/00 (2006.01); H05K 3/04 (2006.01); H05K 3/06 (2006.01); H05K 3/12 (2006.01); H01L 21/033 (2006.01); H05K 3/34 (2006.01)
CPC H05K 3/4007 (2013.01) [H05K 1/09 (2013.01); H05K 1/111 (2013.01); H05K 3/0041 (2013.01); H05K 3/048 (2013.01); H05K 3/064 (2013.01); H05K 3/067 (2013.01); H05K 3/1216 (2013.01); H05K 3/1225 (2013.01); H01L 21/0331 (2013.01); H05K 1/0393 (2013.01); H05K 3/1283 (2013.01); H05K 3/3463 (2013.01); H05K 2203/043 (2013.01); H05K 2203/087 (2013.01); H05K 2203/166 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A method of manufacturing an electrical device, comprising:
forming a patterned inorganic liftoff layer to expose a target electrode site on a softening polymer layer;
depositing an electrode layer on the inorganic liftoff layer and on the exposed target electrode site; and
removing the inorganic liftoff layer by a horizontal liftoff etch to leave the electrode layer on the exposed target electrode site.