US 12,261,239 B2
Device and method for mass transfer of mini light-emitting diodes (mini-LEDs) based on array water jet-based ejection
Yun Chen, Guangzhou (CN); Yanhui Chen, Guangzhou (CN); Li Ma, Guangzhou (CN); Pengwei Lv, Guangzhou (CN); Hao Zhang, Guangzhou (CN); Maoxiang Hou, Guangzhou (CN); and Xin Chen, Guangzhou (CN)
Assigned to Guangdong University of Technology, Guangzhou (CN)
Filed by Guangdong University of Technology, Guangzhou (CN)
Filed on Jul. 11, 2024, as Appl. No. 18/769,404.
Claims priority of application No. 202310992493.0 (CN), filed on Aug. 8, 2023.
Prior Publication US 2024/0363792 A1, Oct. 31, 2024
Int. Cl. H01L 33/00 (2010.01); H01L 21/68 (2006.01); H01L 21/683 (2006.01); H01L 25/075 (2006.01)
CPC H01L 33/005 (2013.01) [H01L 21/681 (2013.01); H01L 21/6835 (2013.01); H01L 25/0753 (2013.01)] 1 Claim
OG exemplary drawing
 
1. A method for mass transfer of mini light-emitting diodes (Mini-LEDs) based on array water jet-based ejection using a device for mass transfer of Mini-LEDs, comprising:
(S1) placing a blue membrane to which a plurality of Mini-LED chips are bonded horizontally on a Z-axis motion platform, and fixing a transfer substrate on a side of an operation platform near the blue membrane;
(S2) scanning, by a vision camera, the plurality of Mini-LED chips to obtain a pose information of the plurality of Mini-LED chips, and controlling a water jet channel to perform adjustment according to the pose information of the plurality of Mini-LED chips; identifying, by the vision camera, the blue membrane, an array water jet-type ejection unit, and a distance between the blue membrane and the transfer substrate to adjust a height of the Z-axis motion platform and a height of the operation platform, and to adjust a planar motion platform to complete positioning of the array water jet-type ejection unit and the plurality of Mini-LED chips in an X-axis direction and a Y-axis direction;
(S3) ejecting, by the array water jet-type ejection unit, a water jet array to drive a first group of Mini-LED chips among the plurality of Mini-LED chips and the blue membrane to be peeled off to the transfer substrate; and
(S4) transferring the array water jet-type ejection unit to a position above a second group of Mini-LED chips among the plurality of Mini-LED chips through positioning of the vision camera, and repeating step (S3) to complete ejection of the plurality of Mini-LED chips.