| CPC H01L 31/0512 (2013.01) [H01L 31/0288 (2013.01); H01L 31/077 (2013.01); H01L 31/1868 (2013.01)] | 5 Claims |

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1. A solar cell, comprising:
a semiconductor substrate comprising a crystalline silicon wafer, the semiconductor substrate having a bulk resistivity greater than 10 ohms centimeter (Ω-cm), wherein the semiconductor substrate is undoped;
an n-type region over a first portion that includes a first surface of the semiconductor substrate, wherein the n-type region comprises an n-doped layer of hydrogenated amorphous silicon (a-Si:H) deposited over a first side of the semiconductor substrate;
a p-type region over a second portion that includes a second surface of the semiconductor substrate, wherein the n-type region and the p-type region form a heterojunction of the solar cell and wherein the first surface is oppositely disposed from the second surface and wherein the p-type region comprises a p-doped layer of a-Si:H deposited over a second side of the semiconductor substrate opposite the first side; and
an intrinsic layer of a-Si:H between the semiconductor substrate and the n-doped layer of a-Si:H.
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