US 12,261,217 B2
Semiconductor device
Masakazu Baba, Matsumoto (JP); and Shinsuke Harada, Tsukuba (JP)
Assigned to FUJI ELECTRIC CO., LTD., Kawasaki (JP)
Filed by FUJI ELECTRIC CO., LTD., Kawasaki (JP)
Filed on Apr. 29, 2024, as Appl. No. 18/649,713.
Application 18/649,713 is a continuation of application No. 17/568,421, filed on Jan. 4, 2022, granted, now 11,996,475.
Claims priority of application No. 2021-000963 (JP), filed on Jan. 6, 2021.
Prior Publication US 2024/0282850 A1, Aug. 22, 2024
Int. Cl. H01L 29/78 (2006.01); H01L 29/06 (2006.01); H01L 29/16 (2006.01); H01L 29/417 (2006.01); H01L 29/423 (2006.01); H01L 29/47 (2006.01); H01L 29/49 (2006.01)
CPC H01L 29/7806 (2013.01) [H01L 29/0696 (2013.01); H01L 29/1608 (2013.01); H01L 29/41741 (2013.01); H01L 29/41775 (2013.01); H01L 29/4238 (2013.01); H01L 29/47 (2013.01); H01L 29/4916 (2013.01); H01L 29/7811 (2013.01); H01L 29/7813 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A silicon carbide semiconductor device comprising:
a drift layer of a first conductivity type provided in a semiconductor base containing silicon carbide;
a base layer of a second conductivity type provided in the semiconductor base at a front surface side thereof;
a plurality of first trenches provided in the semiconductor base at the front surface side thereof, and having a plurality of first portions extending in a first direction to form a striped pattern;
a second trench provided in the semiconductor base at the front surface side thereof, and having a plurality of second portions extending parallel to the plurality of first portions;
a plurality of gate electrodes respectively provided in the plurality of first trenches; and
a diode electrode provided in the second trench, wherein
the diode electrode includes:
a plurality of inner electrodes provided in the plurality of second portions, and
an outer electrode connecting the plurality of inner electrodes and surrounding ends of the first portions in a plan view of the silicon carbide semiconductor device, and
in the first direction, the second portions is spaced apart from the ends of the first portions by a predetermined distance.