| CPC H01L 21/76897 (2013.01) [H01L 21/76831 (2013.01); H01L 23/5226 (2013.01)] | 18 Claims |

|
1. A method for fabricating a semiconductor device, comprising:
forming an active device on a substrate, wherein the active device comprises:
a gate structure comprising:
a gate dielectric layer on the substrate;
a gate electrode on the gate dielectric layer;
a source/drain region adjacent to two sides of the gate electrode; and
forming a floating contact plug directly on the gate electrode.
|