US 12,261,071 B2
Electronic component transfer apparatus, electronic component transfer method, and method of manufacturing a light-emitting diode panel
Ming-Feng Tu, Taichung (TW); Chun-Yi Lin, Taichung (TW); Sheng Che Huang, Taichung (TW); and Chingju Lin, Taichung (TW)
Assigned to ASTI GLOBAL INC., TAIWAN, Taichung (TW)
Filed by ASTI GLOBAL INC., TAIWAN, Taichung (TW)
Filed on Mar. 20, 2022, as Appl. No. 17/699,168.
Claims priority of provisional application 63/185,328, filed on May 6, 2021.
Claims priority of provisional application 63/185,318, filed on May 6, 2021.
Claims priority of application No. 110137634 (TW), filed on Oct. 8, 2021.
Prior Publication US 2022/0359254 A1, Nov. 10, 2022
Int. Cl. H01L 21/68 (2006.01); H01L 25/075 (2006.01); H10H 20/01 (2025.01)
CPC H01L 21/681 (2013.01) [H01L 25/0753 (2013.01); H10H 20/01 (2025.01); H10H 20/0364 (2025.01)] 11 Claims
OG exemplary drawing
 
1. An electronic component transfer apparatus, configured to transfer an electronic component on a flexible carrier to a target substrate, the electronic component transfer apparatus comprising:
a first frame, configured to carry the flexible carrier;
a second frame, configured to carry the target substrate, and the target substrate disposed opposite to the flexible carrier;
an abutting component, disposed adjacent to the flexible carrier and having an abutting end;
an actuating mechanism, configured to actuate the abutting component, and the abutting component moved towards a direction of the flexible carrier, so that the abutting end of the abutting component abuts against the flexible carrier;
an energy generating device, capable of generating an energy beam, and the energy beam directed towards the flexible carrier through the abutting end of the abutting component;
an image capture device, capable of generating a light beam through the abutting end of the abutting component, and configured to capture an image through the abutting end of the abutting component; and
a data processing module, configured to receive and compute the image captured by the image capture device, and determine whether to adjust a relative position between the abutting end and the flexible carrier according to a computation result.