CPC H01L 21/6773 (2013.01) [B23Q 15/00 (2013.01); B23Q 16/00 (2013.01); G05D 5/04 (2013.01); H01L 21/67736 (2013.01); H01L 21/67778 (2013.01); H01L 23/04 (2013.01)] | 20 Claims |
16. A load port, comprising:
an elevator;
a housing that includes a single opening that houses the elevator; and
a stage configured to move within the single opening via the elevator, the stage comprising:
a first portion configured to support a first die container type, and
a second portion configured to support a second die container type,
wherein the elevator is configured to move the first portion within the single opening when a die container on the stage is the first die container type, and
wherein the elevator is configured to move the first portion and the second portion within the single opening when the die container on the stage is the second die container type.
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