CPC H01L 21/6732 (2013.01) | 20 Claims |
1. A wafer support member comprising:
a support column; and
a plurality of wafer-engagement-shelves extending substantially perpendicularly to the support column from a first side of the support column,
wherein each wafer-engagement-shelf defines a plurality of through-holes extending between a base surface and an opposite wafer-engagement surface of the wafer-engagement shelf, wherein the plurality of through-holes serve as discharge ports for a plurality of loose particulates on the wafer-engagement-shelf to exit therefrom via the discharge ports,
wherein the support column further defines a plurality of drain holes extending between the first side and an opposite second side of the support column for a fluid on the wafer-engagement-shelves to drain away therefrom via the plurality of drain holes.
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