US 12,261,066 B2
Substrate processing apparatus and furnace opening closer
Takashi Nogami, Toyama (JP); and Norihiro Yamashima, Toyama (JP)
Assigned to Kokusai Electric Corporation, Tokyo (JP)
Filed by KOKUSAI ELECTRIC CORPORATION, Tokyo (JP)
Filed on Jul. 15, 2021, as Appl. No. 17/376,446.
Application 17/376,446 is a continuation of application No. PCT/JP2020/006416, filed on Feb. 19, 2020.
Claims priority of application No. 2019-028224 (JP), filed on Feb. 20, 2019.
Prior Publication US 2021/0343562 A1, Nov. 4, 2021
Int. Cl. H01L 21/673 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67303 (2013.01) [H01L 21/67098 (2013.01); H01L 21/67757 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A substrate processing apparatus comprising:
a reaction chamber in which a substrate is processed;
a lid configured to close a furnace opening of the reaction chamber;
a base provided below the lid; and
a connector provided to connect the lid and the base,
wherein the connector comprises:
a shaft extending from the lid through the base;
a cap fixed to the base and configured to fix a fixing block thereto below the cap; and
a moving block provided within the fixing block, wherein the moving block is held by a holder having a hollow cylindrical shape and made of an elastic material, wherein the holder is interposed between the fixing block and the moving block such that an outer peripheral surface of the holder is surrounded by and in contact with an inner peripheral surface of the fixing block and an inner peripheral surface of the holder surrounds and is in contact with an outer peripheral surface of the moving block.