US 12,261,029 B2
Protection system for switches in direct drive circuits of substrate processing systems
Maolin Long, Santa Clara, CA (US); Yuhou Wang, Fremont, CA (US); Michael John Martin, Union City, CA (US); and Alexander Miller Paterson, San Jose, CA (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 18/009,575
Filed by Lam Research Corporation, Fremont, CA (US)
PCT Filed Jun. 10, 2021, PCT No. PCT/US2021/036827
§ 371(c)(1), (2) Date Dec. 9, 2022,
PCT Pub. No. WO2021/257374, PCT Pub. Date Dec. 23, 2021.
Claims priority of provisional application 63/040,325, filed on Jun. 17, 2020.
Prior Publication US 2023/0245873 A1, Aug. 3, 2023
Int. Cl. H01J 37/32 (2006.01); G01R 27/08 (2006.01); H02J 50/20 (2016.01)
CPC H01J 37/32935 (2013.01) [G01R 27/08 (2013.01); H01J 37/32082 (2013.01); H02J 50/20 (2016.02)] 24 Claims
OG exemplary drawing
 
1. A direct drive circuit for providing RF power to a component of a processing chamber associated with a substrate processing system, comprising:
the direct drive circuit including a switch and configured to supply said RF power to the component;
a switch protection module configured to:
monitor a load current and a load voltage in the processing chamber;
calculate load resistance based on the load current and the load voltage;
compare the load resistance to a first predetermined load resistance; and
adjust at least one of an RF power limit and an RF current limit of the direct drive circuit based on the comparison;
wherein the first predetermined load resistance is selected based on a resistance during at least one non-plasma condition.