US 12,261,028 B2
Plasma processing apparatus
Shuichi Takahashi, Miyagi (JP); Takaharu Miyadate, Miyagi (JP); Takaaki Kikuchi, Miyagi (JP); Atsushi Ogata, Miyagi (JP); Nobutaka Sasaki, Miyagi (JP); and Takashi Taira, Miyagi (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed on Jun. 14, 2023, as Appl. No. 18/210,012.
Application 18/210,012 is a continuation of application No. 16/582,115, filed on Sep. 25, 2019, abandoned.
Claims priority of application No. 2018-180956 (JP), filed on Sep. 26, 2018.
Prior Publication US 2023/0326725 A1, Oct. 12, 2023
Int. Cl. H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01)
CPC H01J 37/32642 (2013.01) [H01J 37/32724 (2013.01); H01L 21/68735 (2013.01); H01L 21/68742 (2013.01); H01J 2237/002 (2013.01); H01J 2237/20235 (2013.01); H01J 2237/334 (2013.01); H01L 21/67069 (2013.01); H01L 21/6833 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A method for processing a substrate with a plasma processing apparatus, the plasma processing apparatus including:
a plasma processing chamber;
a substrate support disposed in the plasma processing chamber, the substrate support including an electrostatic chuck, the electrostatic chuck having a central portion and a peripheral portion surrounding the central portion, the peripheral portion of the electrostatic chuck having a plurality of first through-holes;
a first ring disposed on the peripheral portion of the electrostatic chuck, the first ring having an inner portion, an intermediate portion and an outer portion, the intermediate portion having a plurality of second through-holes;
a second ring disposed on the intermediate portion of the first ring, a radially outer edge of the second ring being surrounded by the outer portion of the first ring;
a plurality of lift pins respectively extending through the plurality of first through-holes and the plurality of second through-holes; and
one or more shift mechanisms including one or more drivers to vertically shift the plurality of lift pins,
the method comprising:
vertically shifting the plurality of lift pins with a first vertical shift to adjust an upper surface of the second ring in response to consumption of the second ring; and
vertically shifting the plurality of lift pins with a second vertical shift longer than the first vertical shift to transfer and replace the second ring, wherein the first vertical shift has a driving precision of 0.02 mm and the second vertical shift has a driving precision of 0.1 mm.