US 12,261,023 B2
Microwave plasma apparatus and methods for processing materials using an interior liner
Richard K. Holman, Wellesley, MA (US); and Saurabh Ullal, Hollis, NH (US)
Assigned to 6K Inc., North Andover, MA (US)
Filed by 6K Inc., North Andover, MA (US)
Filed on May 19, 2023, as Appl. No. 18/320,655.
Claims priority of provisional application 63/365,171, filed on May 23, 2022.
Prior Publication US 2023/0377848 A1, Nov. 23, 2023
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/3244 (2013.01) [H01J 37/32201 (2013.01); H01J 37/32495 (2013.01); H01J 2237/0268 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A microwave plasma apparatus for processing a material, comprising:
a quartz tube in communication with at least one microwave radiation source, a reaction chamber, and a material feeding system; and
a liner disposed within the quartz tube, the liner comprising a material resistant to H2, CO2, or CH4 gasses;
wherein the liner is disposed between the quartz tube and a plasma generation zone of the microwave plasma apparatus;
wherein the liner comprises a coating of the material resistant to H2, CO2, or CH4 gasses applied to the quartz tube.
 
12. An interior liner disposed in a microwave plasma apparatus, the liner comprising a material resistant to H2, CO2, or CH4 gasses and positioned between a quartz tube and a plasma generation zone of the microwave plasma apparatus, wherein the interior liner is a continuous coating of the material applied to the quartz tube.