US 12,261,018 B2
Plenum assemblies for cooling transformer coupled plasma windows
Hanry Issavi, San Jose, CA (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 17/795,356
Filed by LAM RESEARCH CORPORATION, Fremont, CA (US)
PCT Filed Jan. 22, 2021, PCT No. PCT/US2021/014505
§ 371(c)(1), (2) Date Jul. 26, 2022,
PCT Pub. No. WO2021/154590, PCT Pub. Date Aug. 5, 2021.
Claims priority of provisional application 62/968,305, filed on Jan. 31, 2020.
Prior Publication US 2023/0065203 A1, Mar. 2, 2023
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32119 (2013.01) [H01J 37/32522 (2013.01); H01J 2237/002 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A plenum for a dielectric window of a substrate processing system, the plenum comprising:
a first inlet port;
a second inlet port; and
a body comprising
a first recessed area configured to hold a first coil,
a second recessed area configured to hold a second coil,
a third recessed area configured to oppose a first area of the dielectric window, receive a first coolant from the first inlet port, and direct the first coolant across the first area to cool a first portion of the dielectric window, and
a fourth recessed area configured to oppose a second area of the dielectric window, receive a second coolant from the second inlet port, and direct the second coolant across the second area to cool a second portion of the dielectric window,
wherein the body comprises a backup passage for cooling at least one of the third recessed area and a fifth recessed area.