US 12,261,016 B1
Electron detection device and scanning electron microscope
Da Yin, Anhui (CN); Tianjun Li, Anhui (CN); Bin Sun, Anhui (CN); Wei Zhang, Anhui (CN); Feng Cao, Anhui (CN); and Yu He, Anhui (CN)
Assigned to CIQTEK CO., LTD., Anhui (CN)
Filed by CIQTEK CO., LTD., Anhui (CN)
Filed on Jan. 3, 2025, as Appl. No. 19/008,683.
Application 19/008,683 is a continuation of application No. PCT/CN2024/105340, filed on Jul. 12, 2024.
Claims priority of application No. 202410490804.8 (CN), filed on Apr. 23, 2024.
Int. Cl. H01J 37/244 (2006.01); H01J 37/10 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/244 (2013.01) [H01J 37/28 (2013.01); H01J 37/10 (2013.01); H01J 2237/026 (2013.01); H01J 2237/15 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An electron detection device, comprising:
a reflective energy analyzer comprising a first control electrode and a second control electrode that are sequentially arranged in an incidence direction of an electron beam, the first control electrode being configured to generate a first electric field between the first control electrode and the second control electrode;
a first detector disposed at a side of the second control electrode away from the first control electrode, the first detector being configured to receive a secondary electron generated by the electron beam acting on a target sample;
a second detector disposed at a side of the first control electrode away from the second control electrode, the second detector being configured to receive a backscattered electron generated by the electron beam acting on the target sample; and
a conductive shielding tube penetrating the first control electrode and the second control electrode in the incidence direction of the electron beam, the conductive shielding tube being configured to shield an electric field generated by the reflective energy analyzer, allowing the electron beam to pass through and be incident on the target sample,
wherein the first control electrode has an axisymmetric structure and has a through hole at a center of the first control electrode, the through hole being provided to allow the electron beam to pass through, a centerline of the through hole coinciding with a symmetry axis;
the first control electrode extends outwards from the symmetry axis as a center to form an extension surface, the extension surface being a curved surface with a downward opening, and a side of the curved surface away from the symmetry axis pointing towards the first detector, wherein the symmetry axis is an axis where the incidence direction of the electron beam is located; and
the second control electrode has a same shape as the first control electrode, and the second control electrode and the first control electrode together define an interlayer, enabling the first electric field formed within the interlayer to guide the secondary electron to be deflected onto the first detector and received by the first detector.