US 12,261,013 B2
Charged particle beam system and control method therefor
Takeshi Kaneko, Tokyo (JP); Isamu Ishikawa, Tokyo (JP); and Eiji Okunishi, Tokyo (JP)
Assigned to JEOL Ltd., Tokyo (JP)
Filed by JEOL Ltd., Tokyo (JP)
Filed on Oct. 12, 2022, as Appl. No. 17/964,516.
Claims priority of application No. 2021-168130 (JP), filed on Oct. 13, 2021.
Prior Publication US 2023/0115486 A1, Apr. 13, 2023
Int. Cl. H01J 37/04 (2006.01); H01J 37/20 (2006.01); H01J 37/26 (2006.01)
CPC H01J 37/045 (2013.01) [H01J 37/20 (2013.01); H01J 37/26 (2013.01); H01J 2237/151 (2013.01); H01J 2237/20207 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A charged particle beam system comprising:
a beam blanker for blanking a charged particle beam;
a sample stage on which a sample is tiltably held and thus can assume a tilt angle;
a blanking controller for controlling the blanking of the charged particle beam and causing a pulsed beam having a duty ratio to be directed at the sample; and
a tilt controller for controlling the tilt angle of the sample;
wherein the blanking controller sets the duty ratio of the pulsed beam based on the tilt angle of the sample.