US 12,260,969 B2
Conductive film, method for producing same, conductor, resist pattern formation method, and laminate
Saki Makigawa, Tokyo (JP); Akira Yamazaki, Tokyo (JP); Naoko Yamada, Tokyo (JP); Yoshiko Irie, Tokyo (JP); Shinji Saiki, Tokyo (JP); and Masashi Uzawa, Tokyo (JP)
Assigned to Mitsubishi Chemical Corporation, Tokyo (JP)
Filed by Mitsubishi Chemical Corporation, Tokyo (JP)
Filed on Sep. 2, 2020, as Appl. No. 17/009,870.
Application 17/009,870 is a continuation of application No. PCT/JP2019/010536, filed on Mar. 14, 2019.
Claims priority of application No. 2018-048383 (JP), filed on Mar. 15, 2018.
Prior Publication US 2021/0005343 A1, Jan. 7, 2021
Int. Cl. H01B 1/12 (2006.01); C08J 5/18 (2006.01)
CPC H01B 1/124 (2013.01) [C08J 5/18 (2013.01); C08J 2300/12 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A conductive film comprising:
a conductive polymer (A); and
a water-soluble polymer (C) having a nitrogen-containing functional group;
wherein:
a thickness of the conductive film is 35 nm or less,
a surface resistivity of the conductive film is 1×1011 Ω/sq. or less,
a standard deviation of current that flows through the conductive film upon application of voltage to the conductive film is 1.8 or less, and
a peak area ratio determined by formula (I) is 0.44 or less, which is determined based on results of analysis performed by the following measurement method using a high performance liquid chromatograph mass spectrometer:
(Measurement Method)
a test solution (β) obtained by extracting the water-soluble polymer (C) from an aqueous solution obtained by dissolving the conductive film in water with an organic solvent (β) is analyzed using a high performance liquid chromatograph mass spectrometer, and a peak area ratio is calculated by formula (I), wherein the organic solvent (β) is any one of n-butanol, butyl acetate, and methyl isobutyl ketone,
Area ratio=Y/(X+Y)  (I),
wherein X is a total peak area of an extracted ion chromatogram prepared with respect to ions derived from compounds having a molecular weight (M) of 600 or more from a total ion current chromatogram, Y is a total peak area of an extracted ion chromatogram prepared with respect to ions derived from compounds having a molecular weight (M) of less than 600 from the total ion current chromatogram.