| CPC G06V 40/1306 (2022.01) [G06F 3/044 (2013.01); G06F 2203/04111 (2013.01)] | 12 Claims |

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1. An electrode structure, comprising:
a first electrode having an opening;
a first insulating layer, disposed on the first electrode;
a second electrode, disposed on the first insulating layer;
a third electrode, disposed on the first insulating layer and surrounding the second electrode; and
a conductive layer disposed under the first electrode,
wherein the second electrode and the third electrode are in the same layer.
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