US 12,260,548 B2
Abnormality detection apparatus and abnormality detection method
Motoi Okada, Sapporo (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Feb. 7, 2024, as Appl. No. 18/435,497.
Application 18/435,497 is a continuation of application No. 17/205,422, filed on Mar. 18, 2021, granted, now 11,928,810.
Claims priority of application No. 2020-054721 (JP), filed on Mar. 25, 2020.
Prior Publication US 2024/0212130 A1, Jun. 27, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G06T 7/00 (2017.01); B05B 12/08 (2006.01); G06N 20/00 (2019.01)
CPC G06T 7/001 (2013.01) [B05B 12/084 (2013.01); G06N 20/00 (2019.01); G06T 2207/20081 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An abnormality detection apparatus comprising:
a first generation part configured to generate pseudo-abnormal image data by synthesizing an image of liquid dripping or liquid dropping at a random position of an image of normal image data obtained by photographing equipment, which includes a liquid supply and in which no liquid dripping or liquid dropping has occurred;
a second generation part configured to generate a determination model for determining whether the equipment is normal or abnormal by performing learning of the normal image data and the pseudo-abnormal image data;
an acquisition part configured to acquire image data obtained by photographing the equipment; and
a detection part configured to detect an abnormality in the equipment from the image data acquired by the acquisition part using the determination model.