US 12,259,719 B2
Methods and mechanisms for preventing fluctuation in machine-learning model performance
Jui-Che Lin, Taipei (TW); Chao-Hsien Lee, Taoyuan (TW); and Shauh-Teh Juang, Zhubei (TW)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on May 25, 2022, as Appl. No. 17/824,282.
Prior Publication US 2023/0384777 A1, Nov. 30, 2023
Int. Cl. G05B 19/418 (2006.01)
CPC G05B 19/41885 (2013.01) [G05B 19/4183 (2013.01); G05B 19/41875 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method comprising:
receiving, by a processor, input data reflecting a feature related to a manufacturing process of a substrate;
generating a characteristic sequence defining a relationship between at least two manufacturing parameters;
determining a relationship between one or more variables related to the feature and the characteristic sequence;
determining a weight based on the determined relationship;
applying the weight to the feature; and
training a machine-learning model in view of the weighted feature.