US 12,259,656 B1
Method of fabricating structured membranes
Elissa Williams, Greenbelt, MD (US); Kevin Denis, Crofton, MD (US); and Hsiang-Yu Liu, Lanham, MD (US)
Assigned to United States of America as represented by the Administrator of NASA, Washington, DC (US)
Filed by United States of America as represented by the Administrator of NASA, Washington, DC (US)
Filed on Sep. 23, 2022, as Appl. No. 17/951,306.
Int. Cl. G03F 7/34 (2006.01); G03F 7/36 (2006.01); B81C 1/00 (2006.01)
CPC G03F 7/343 (2013.01) [G03F 7/36 (2013.01); B81C 1/00531 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A method comprising the steps of:
providing a membrane wafer on a substrate;
providing at least one thin-film on said membrane wafer wherein portions of said membrane wafer are exposed;
covering said portions of said membrane wafer and each said thin-film with a protectant that is inert in acetone;
etching portions of said protectant through to said membrane wafer, wherein each said thin-film remains fully covered by said protectant;
coupling a handle to said protectant with a wax that dissolves in acetone;
removing portions of said substrate wherein a contiguous region of said membrane wafer is defined and exposed adjacent to each said thin-film and said portions of said protectant so-etched;
exposing said wax to acetone wherein said wax dissolves and said handle is uncoupled from said protectant;
etching through said contiguous region of said membrane wafer at said portions of said protectant so-etched; and
removing said protectant.