CPC G03F 7/343 (2013.01) [G03F 7/36 (2013.01); B81C 1/00531 (2013.01)] | 23 Claims |
1. A method comprising the steps of:
providing a membrane wafer on a substrate;
providing at least one thin-film on said membrane wafer wherein portions of said membrane wafer are exposed;
covering said portions of said membrane wafer and each said thin-film with a protectant that is inert in acetone;
etching portions of said protectant through to said membrane wafer, wherein each said thin-film remains fully covered by said protectant;
coupling a handle to said protectant with a wax that dissolves in acetone;
removing portions of said substrate wherein a contiguous region of said membrane wafer is defined and exposed adjacent to each said thin-film and said portions of said protectant so-etched;
exposing said wax to acetone wherein said wax dissolves and said handle is uncoupled from said protectant;
etching through said contiguous region of said membrane wafer at said portions of said protectant so-etched; and
removing said protectant.
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