US 12,259,606 B2
Method for fabricating a liquid-crystal-based electro-optical light modulator using surface MEMS techniques for flat panel display inspection
Jason S. Reid, San Jose, CA (US); and Karla Gutierrez Cuevas, San Jose, CA (US)
Assigned to Orbotech Ltd., Yavne (IL)
Filed by Orbotech Ltd., Yavne (IL)
Filed on Sep. 8, 2023, as Appl. No. 18/244,087.
Claims priority of provisional application 63/406,712, filed on Sep. 14, 2022.
Prior Publication US 2024/0085728 A1, Mar. 14, 2024
Int. Cl. G02F 1/03 (2006.01); G01N 21/17 (2006.01); G02B 5/08 (2006.01); G02F 1/1337 (2006.01)
CPC G02F 1/0311 (2013.01) [G01N 21/1717 (2013.01); G02B 5/0833 (2013.01); G02F 1/133711 (2013.01); G01N 2021/1721 (2013.01); G02F 2201/38 (2013.01); G02F 2202/022 (2013.01)] 21 Claims
OG exemplary drawing
 
1. An electro-optic modulator comprising:
a glass substrate;
a transparent electrode disposed on the glass substrate;
a first alignment layer disposed on the transparent electrode;
a liquid crystal layer disposed on the first alignment layer;
a second alignment layer disposed on the liquid crystal layer;
a polymer layer disposed on the second alignment layer;
a plurality of polymer studs; wherein the plurality of polymer studs extend through at least a portion of the liquid crystal layer; wherein the plurality of polymer studs mechanically support the polymer layer;
a dielectric mirror disposed on the polymer layer; and
a hard coat layer disposed on the dielectric mirror.