CPC G02B 27/644 (2013.01) [G01D 5/34746 (2013.01); G02B 26/101 (2013.01); H04N 3/08 (2013.01); H04N 23/60 (2023.01); H04N 23/685 (2023.01)] | 20 Claims |
1. A system comprising:
(a) a stage, wherein, when in use, said stage (i) moves along an axis and (ii) holds a substrate comprising a plurality of fields;
(b) an objective lens;
(c) a camera optically coupled to said stage by a light path, wherein, when in use, said camera captures an image of one field of said plurality of fields through said objective lens, said image acquired via at least a portion of said light path, wherein said portion is defined from one field of said plurality of fields through said objective lens to said camera during acquisition of said image;
(d) a motion tracking mirror mounted along said light path;
(e) an electric motor operably coupled to said motion tracking mirror to actuate angular motion of said motion tracking mirror along said axis of stage movement in said light path; and
(f) a controller module operably coupled to said electric motor to send a driving signal to said electric motor, wherein, when in use, said controller module generates said driving signal as a function of a velocity fluctuation of said stage or said substrate movement along said axis.
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