US 12,259,546 B2
Micromirror arrays
Alexandre Halbach, Leuven (BE); Nitesh Pandey, Eindhoven (NL); Sebastianus Adrianus Goorden, Eindhoven (NL); Veronique Rochus, Leuven (BE); Luc Roger Simonne Haspeslagh, Linden (BE); and Guilherme Brondani Torri, Leuven (BE)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Appl. No. 17/634,023
Filed by ASML NETHERLANDS B.V., Veldhoven (BE); and IMEC v.z.w., Leuven (BE)
PCT Filed Aug. 5, 2020, PCT No. PCT/EP2020/072006
§ 371(c)(1), (2) Date Feb. 9, 2022,
PCT Pub. No. WO2021/032484, PCT Pub. Date Feb. 25, 2021.
Claims priority of application No. 19192294 (EP), filed on Aug. 19, 2019; and application No. 19199722 (EP), filed on Sep. 26, 2019.
Prior Publication US 2022/0342199 A1, Oct. 27, 2022
Int. Cl. G02B 26/08 (2006.01); B81B 3/00 (2006.01); B81B 7/00 (2006.01); G03F 7/00 (2006.01)
CPC G02B 26/085 (2013.01) [B81B 3/0021 (2013.01); B81B 7/0087 (2013.01); G03F 7/70116 (2013.01); G03F 7/7015 (2013.01); B81B 2201/042 (2013.01); B81B 2203/0136 (2013.01); B81B 2203/0163 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A micromirror array comprising:
a substrate;
a plurality of mirrors for reflecting incident radiation;
for each mirror of the plurality of mirrors, a respective post supporting the respective mirror; and
for each mirror of the plurality of mirrors, one or more electrostatic actuators connected to the substrate to apply force to the respective post to displace the respective post relative to the substrate and to displace the respective mirror,
wherein the one or more electrostatic actuators is connected to the respective post by one or more spring elements.