US 12,259,230 B2
Three-dimensional measurement device
Hiroyuki Ishigaki, Aichi (JP); Tomoru Okada, Aichi (JP); and Ikuo Futamura, Aichi (JP)
Assigned to CKD CORPORATION, Aichi (JP)
Filed by CKD CORPORATION, Aichi (JP)
Filed on Apr. 5, 2023, as Appl. No. 18/295,845.
Application 18/295,845 is a continuation of application No. PCT/JP2021/028093, filed on Jul. 29, 2021.
Claims priority of application No. 2020-179484 (JP), filed on Oct. 27, 2020.
Prior Publication US 2023/0243643 A1, Aug. 3, 2023
Int. Cl. G01B 11/24 (2006.01); G01B 9/02 (2022.01); G01B 9/02001 (2022.01); G01B 9/02015 (2022.01)
CPC G01B 11/2441 (2013.01) [G01B 9/02007 (2013.01); G01B 9/02024 (2013.01); G01B 9/0203 (2013.01); G01B 9/02083 (2013.01); G01B 2290/70 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A three-dimensional measurement device, comprising
a light emitter that emits a predetermined light;
an optical system that splits an incident light from the light emitter into an object light and a reference light, irradiates a measurement object with the object light and irradiates a reference plane with the reference light, and recombines the object light and the reference light with each other and emits a combined light;
an imaging device that comprises an imaging element and takes an image of a light emitted from the optical system to obtain luminance image data, wherein the imaging element comprises a plurality of light-receiving elements and multiple different types of polarizers, the polarizers having different set angles of transmission axes and being arranged to have one-to-one correspondence with the light-receiving elements;
a storage device that stores transmission axis absolute angle data each obtained by a previous actual measurement of an absolute angle of a transmission axis of each of the polarizers; and
a control device that calculates, by a phase shift method, a phase difference between the reference light and the object light at a measurement position of the measurement object, based on a piece of luminance data of each pixel in the luminance image data and a piece of the transmission axis absolute angle data of each of the polarizers corresponding to the pixel, and measures a height of the measurement object at the measurement position.